Optimization of x-ray sources for proximity lithography produced by a high average power Nd:glass laser

Technical Report · Sat Jul 01 04:00:00 EDT 1995

DOI:https://doi.org/10.2172/93995· OSTI ID:93995

Celliers, P; DaSilva, L B; Dane, C B ^[1]

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1. and others

We measured the conversion efficiency of laser pulse energy into x-rays from a variety of solid planar targets and a Xe gas puff target irradiated using a high average power Nd:glass slab laser capable of delivering 13 ns FWHM pulses at up to 20 J at 1.053 {mu}m and 12 J at 0.53 {mu}m. Targets where chosen to optimize emission in the 9-19 {Angstrom} wavelength band, including L-shell emission from materials with atomic numbers in the Z=24-30 and M-shell emission from Xe (Z=54). With 1.053 {mu}m a maximum conversion of 10% into 2{pi} sr was measured from solid Xe and type 302 stainless steel targets. At 0.527 {mu}m efficiencies of 12-18%/(2{pi} sr) were measured for all of the solid targets in the same wavelength band. The x-ray conversion efficiency from the Xe gas puff target was considerably lower, at about 3%/(2{pi} sr) when irradiated with 1.053 {mu}m.

• Research Organization: Lawrence Livermore National Lab., CA (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States); Department of Defense, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 93995
• Report Number(s): UCRL-CR--121294; ON: DE95015981; CNN: ARPA Order No. A251
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
BRASS
CONVERSION
COPPER
IRON
L SHELL
LASER TARGETS
LASER-PRODUCED PLASMA
M SHELL
NEODYMIUM LASERS
STAINLESS STEELS
X-RAY SOURCES
XENON
ZINC