Microelectromechanical systems contact stress sensor

Kotovsky, Jack

Microelectromechanical systems contact stress sensor

Patent · Tue Dec 25 04:00:00 EST 2007

OSTI ID:921497

Kotovsky, Jack ^[1]

Oakland, CA

A microelectromechanical systems stress sensor comprising a microelectromechanical systems silicon body. A recess is formed in the silicon body. A silicon element extends into the recess. The silicon element has limited freedom of movement within the recess. An electrical circuit in the silicon element includes a piezoresistor material that allows for sensing changes in resistance that is proportional to bending of the silicon element.

Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA

Sponsoring Organization:: United States Department of Energy

DOE Contract Number:: W-7405-ENG-48

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Number(s):: 7,311,009

Application Number:: 11/143,543

OSTI ID:: 921497

Country of Publication:: United States

Language:: English

References (7)

Development of a new contact-type piezoresistive micro-shear-stress sensor Hsieh, M. C.; Fang, Yean-Kuen; Ju, M. S. Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, SPIE Proceedings https://doi.org/10.1117/12.462822	conference	April 2002
A flexible MEMS technology and its first application to shear stress sensor skin No authors listed Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots https://doi.org/10.1109/MEMSYS.1997.581894	conference	January 1997
New tactile sensor chip with silicone rubber cover Leineweber, Michael; Pelz, Georg; Schmidt, Michael Sensors and Actuators A: Physical, Vol. 84, Issue 3, p. 236-245 https://doi.org/10.1016/S0924-4247(00)00310-1	journal	September 2000
A miniature piezoelectric polymer transducer for in vitro measurement of the dynamic contact stress distribution Manouel, Mehran; Pearlman, Hubert S.; Belakhlef, Abdelfatihe Journal of Biomechanics, Vol. 25, Issue 6, p. 627-635 https://doi.org/10.1016/0021-9290(92)90104-9	journal	June 1992
Review Article Tactile sensing for mechatronics—a state of the art survey Lee, M. H.; Nicholls, H. R. Mechatronics, Vol. 9, Issue 1, p. 1-31 https://doi.org/10.1016/S0957-4158(98)00045-2	journal	February 1999
Flexible miniature ribbon cables for long-term connection to implantable sensors Hetke, J. F.; Najafi, K.; Wise, K. D. Sensors and Actuators A: Physical, Vol. 23, Issue 1-3, p. 999-1002 https://doi.org/10.1016/0924-4247(90)87076-U	journal	April 1990
Silicon ribbon cables for chronically implantable microelectrode arrays Hetke, J. F.; Lund, J. L.; Najafi, K. IEEE Transactions on Biomedical Engineering, Vol. 41, Issue 4 https://doi.org/10.1109/10.284959	journal	April 1994

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