Microelectromechanical inertial sensor

Patent · Tue Jun 26 04:00:00 EDT 2012

OSTI ID:1055448

Okandan, Murat ^[1]; Nielson, Gregory N ^[2]

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1. Edgewood, NM
2. Albuquerque, NM

A microelectromechanical (MEM) inertial sensor is disclosed which can be used to sense a linear acceleration, or a Coriolis acceleration due to an angular rotation rate, or both. The MEM inertial sensor has a proof mass which is supported on a bridge extending across an opening through a substrate, with the proof mass being balanced on the bridge by a pivot, or suspended from the bridge by the pivot. The proof mass can be oscillated in a tangential direction in the plane of the substrate, with any out-of-plane movement of the proof mass in response to a sensed acceleration being optically detected using transmission gratings located about an outer edge of the proof mass to generate a diffracted light pattern which changes with the out-of-plane movement of the proof mass.

• Research Organization: Sandia National Laboratories
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): 8,205,497
• Application Number: US patentn application 12/398,559
• OSTI ID: 1055448
• Country of Publication: United States
• Language: English

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