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Contact stress sensor

Patent ·
OSTI ID:1037764
 [1]
  1. Oakland, CA
+ Show Author Affiliations
A contact stress sensor includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a thermal compensator and a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Number(s):
8,109,149
Application Number:
12/274,253
OSTI ID:
1037764
Country of Publication:
United States
Language:
English

References (2)

A flexible MEMS technology and its first application to shear stress sensor skin
  • No authors listed
  • Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots https://doi.org/10.1109/MEMSYS.1997.581894
conference January 1997
Development of polyimide flexible tactile sensor skin journal February 2003

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