Contact stress sensor

Kotovsky, Jack

Contact stress sensor

Patent · Tue Feb 11 04:00:00 EST 2014

OSTI ID:1124617

Kotovsky, Jack

A method for producing a contact stress sensor that includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.

Research Organization:: LLNL (Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States))

Sponsoring Organization:: USDOE

DOE Contract Number:: AC52-07NA27344

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Number(s):: 8,646,335

Application Number:: 13/349,492

OSTI ID:: 1124617

Country of Publication:: United States

Language:: English

References (9)

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Flexible miniature ribbon cables for long-term connection to implantable sensors Hetke, J. F.; Najafi, K.; Wise, K. D. Sensors and Actuators A: Physical, Vol. 23, Issue 1-3, p. 999-1002 https://doi.org/10.1016/0924-4247(90)87076-U	journal	April 1990
Silicon ribbon cables for chronically implantable microelectrode arrays Hetke, J. F.; Lund, J. L.; Najafi, K. IEEE Transactions on Biomedical Engineering, Vol. 41, Issue 4 https://doi.org/10.1109/10.284959	journal	April 1994
Development of polyimide flexible tactile sensor skin Engel, Jonathan; Chen, Jack; Liu, Chang Journal of Micromechanics and Microengineering, Vol. 13, Issue 3 https://doi.org/10.1088/0960-1317/13/3/302	journal	February 2003
Development of a new contact-type piezoresistive micro-shear-stress sensor Hsieh, M. C.; Fang, Yean-Kuen; Ju, M. S. Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, SPIE Proceedings https://doi.org/10.1117/12.462822	conference	April 2002
New tactile sensor chip with silicone rubber cover Leineweber, Michael; Pelz, Georg; Schmidt, Michael Sensors and Actuators A: Physical, Vol. 84, Issue 3, p. 236-245 https://doi.org/10.1016/S0924-4247(00)00310-1	journal	September 2000
A miniature piezoelectric polymer transducer for in vitro measurement of the dynamic contact stress distribution Manouel, Mehran; Pearlman, Hubert S.; Belakhlef, Abdelfatihe Journal of Biomechanics, Vol. 25, Issue 6, p. 627-635 https://doi.org/10.1016/0021-9290(92)90104-9	journal	June 1992
Review Article Tactile sensing for mechatronics—a state of the art survey Lee, M. H.; Nicholls, H. R. Mechatronics, Vol. 9, Issue 1, p. 1-31 https://doi.org/10.1016/S0957-4158(98)00045-2	journal	February 1999
Blends of thermoplastic polyimide with epoxy resin: Part II Mechanical studies Kimoto, Masaki; Mizutani, Kiyoshi Journal of Materials Science, Vol. 32, Issue 9, p. 2479-2483 https://doi.org/10.1023/A:1018577712329	journal	January 1997

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