Record High Extreme-Ultraviolet Efficiency at Near-Normal Incidence from a Multilayer-Coated Polymer Over-coated Blazed Ion-Etched Holographic Grating
We have measured the extreme-ultraviolet (EUV) efficiency of a polymer-overcoated blazed ion-etched holographic test grating. The grating had a magnetron-sputtered Mo{sub 2}C; Si multilayer coating matched to the grating blaze angle of 2.78 degrees. At an angle of incidence of 5.6 degrees and a wavelength of 15.79 nm, the measured efficiency peaks in the second outside order at 29.9%. The derived groove efficiency is 53.0%. To the best of our knowledge these are the highest values obtained yet at EUV wavelengths from a holographic ion-etched blazed grating.
- Research Organization:
- Brookhaven National Laboratory (BNL) National Synchrotron Light Source
- Sponsoring Organization:
- Doe - Office Of Science
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 913637
- Report Number(s):
- BNL--78205-2007-JA
- Journal Information:
- Opt. Lett., Journal Name: Opt. Lett. Journal Issue: 24 Vol. 29; ISSN 0146-9592; ISSN OPLEDP
- Country of Publication:
- United States
- Language:
- English
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