Near-normal-incidence Extreme-Ultraviolet Efficiency of a Flat Crystalline Anisotropically Etched Blazed Grating
We have measured the extreme-ultraviolet (EUV) efficiency at an angle of incidence of 10 deg of a flat crystalline anisotropically etched blazed grating. The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile. The highest groove efficiencies derived from the measurements are 48.8% at 19.07 nm and 64.1% at 16.53 nm for the -2 and -3 orders, respectively, which are comparable to the best values obtained yet from a holographic ion-etched blazed grating. This presents opportunities to instrument designs for high-resolution EUV spectroscopy in astrophysics where high efficiency in high orders is desirable.
- Research Organization:
- Brookhaven National Laboratory (BNL) National Synchrotron Light Source
- Sponsoring Organization:
- Doe - Office Of Science
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 914259
- Report Number(s):
- BNL--78827-2007-JA
- Journal Information:
- Appl. Optics-OT, Journal Name: Appl. Optics-OT Journal Issue: 8 Vol. 45; ISSN 0003-6935; ISSN APOPAI
- Country of Publication:
- United States
- Language:
- English
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