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Near-normal-incidence Extreme-Ultraviolet Efficiency of a Flat Crystalline Anisotropically Etched Blazed Grating

Journal Article · · Appl. Optics-OT
We have measured the extreme-ultraviolet (EUV) efficiency at an angle of incidence of 10 deg of a flat crystalline anisotropically etched blazed grating. The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile. The highest groove efficiencies derived from the measurements are 48.8% at 19.07 nm and 64.1% at 16.53 nm for the -2 and -3 orders, respectively, which are comparable to the best values obtained yet from a holographic ion-etched blazed grating. This presents opportunities to instrument designs for high-resolution EUV spectroscopy in astrophysics where high efficiency in high orders is desirable.
Research Organization:
Brookhaven National Laboratory (BNL) National Synchrotron Light Source
Sponsoring Organization:
Doe - Office Of Science
DOE Contract Number:
AC02-98CH10886
OSTI ID:
914259
Report Number(s):
BNL--78827-2007-JA
Journal Information:
Appl. Optics-OT, Journal Name: Appl. Optics-OT Journal Issue: 8 Vol. 45; ISSN 0003-6935; ISSN APOPAI
Country of Publication:
United States
Language:
English