X-ray microdiffraction: Local stress distributions in polycrystalline and epitaxial thin films
Journal Article
·
· Microelectron.Eng.75:117-126,2004
OSTI ID:890884
No abstract prepared.
- Research Organization:
- Stanford Linear Accelerator Center (SLAC)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-76SF00515
- OSTI ID:
- 890884
- Report Number(s):
- SLAC-REPRINT-2004-219
- Journal Information:
- Microelectron.Eng.75:117-126,2004, Journal Name: Microelectron.Eng.75:117-126,2004
- Country of Publication:
- United States
- Language:
- English
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