Scanning X-ray microdiffraction with submicrometer white beam for strain / stress and orientation mapping in thin films
Journal Article
·
· Journal of Synchrotron Radiation
- SLAC
No abstract prepared.
- Research Organization:
- Stanford Linear Accelerator Center, Menlo Park, CA (US); Stanford Synchrotron Radiation Laboratory (US)
- Sponsoring Organization:
- USDOE Office of Science (US)
- DOE Contract Number:
- AC03-76SF00515
- OSTI ID:
- 831024
- Report Number(s):
- SLAC-REPRINT-2003-014
- Journal Information:
- Journal of Synchrotron Radiation, Journal Name: Journal of Synchrotron Radiation Vol. 10
- Country of Publication:
- United States
- Language:
- English
Similar Records
Scanning x-ray microdiffraction with submicron white beam for strain and orientation mapping in thin films
Mapping of strain fields about thin film structures using x-ray microdiffraction.
X-ray microdiffraction: Local stress distributions in polycrystalline and epitaxial thin films
Journal Article
·
Mon Jan 13 23:00:00 EST 2003
· Journal of Synchrotron Radiation
·
OSTI ID:823200
Mapping of strain fields about thin film structures using x-ray microdiffraction.
Journal Article
·
Tue Jul 01 00:00:00 EDT 2003
· Appl. Phys. Lett.
·
OSTI ID:15005799
X-ray microdiffraction: Local stress distributions in polycrystalline and epitaxial thin films
Journal Article
·
Thu Mar 31 23:00:00 EST 2005
· Microelectron.Eng.75:117-126,2004
·
OSTI ID:890884