Solid source MOCVD system
Patent
·
OSTI ID:871889
- Yakima, WA
- San Jose, CA
A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metalorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- Regents of University of California (Los Alamos, NM)
- Patent Number(s):
- US 5820678
- OSTI ID:
- 871889
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
/118/
cartridge
cartridges
chamber
chemical
chemical vapor
conducting oxide
containing
contents
delivery
deposition
deposition chamber
desired
fabrication
fed
feeding
film
film deposition
films
ground
materials
metalorganic
mocvd
multi-component
multiple
non-superconducting
organic precursor
organic precursors
oxide
oxide film
oxide films
packed
precursor
precursor material
precursor materials
precursors
provides
rate
reaction
reaction zone
solid
solid source
source
superconducting
superconducting oxide
tightly
tightly packed
vapor
vapor deposition
vaporization
vaporization zone
zone
cartridge
cartridges
chamber
chemical
chemical vapor
conducting oxide
containing
contents
delivery
deposition
deposition chamber
desired
fabrication
fed
feeding
film
film deposition
films
ground
materials
metalorganic
mocvd
multi-component
multiple
non-superconducting
organic precursor
organic precursors
oxide
oxide film
oxide films
packed
precursor
precursor material
precursor materials
precursors
provides
rate
reaction
reaction zone
solid
solid source
source
superconducting
superconducting oxide
tightly
tightly packed
vapor
vapor deposition
vaporization
vaporization zone
zone