Solid source MOCVD system
Patent
·
OSTI ID:675867
A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metallorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition. 13 figs.
- Research Organization:
- University of California
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- Univ. of California, Los Alamos, NM (United States)
- Patent Number(s):
- US 5,820,678/A/
- Application Number:
- PAN: 8-865,827
- OSTI ID:
- 675867
- Country of Publication:
- United States
- Language:
- English
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