Solid source MOCVD system

Patent · Tue Oct 13 00:00:00 EDT 1998

OSTI ID:675867

Hubert, B N; Wu, X D

A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metallorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition. 13 figs.

• Research Organization: Univ. of California (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• Assignee: Univ. of California, Los Alamos, NM (United States)
• Patent Number(s): US 5,820,678/A/
• Application Number: PAN: 8-865,827
• OSTI ID: 675867
• Resource Relation: Other Information: PBD: 13 Oct 1998
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CHEMICAL VAPOR DEPOSITION
OXIDES
PRECURSOR
CHEMICAL REACTORS
FABRICATION
HIGH-TC SUPERCONDUCTORS