Forming aspheric optics by controlled deposition
Abstract
An aspheric optical element formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin (.about.100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application.
- Inventors:
-
- Modesto, CA
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 871511
- Patent Number(s):
- US 5745286
- Assignee:
- Regents of University of California (Oakland, CA)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- forming; aspheric; optics; controlled; deposition; optical; element; formed; depositing; material; spherical; surface; form; desired; shape; reflecting; single; multi-layer; evaporative; sputtering; techniques; elements; suitable; deep; ultra-violet; x-ray; wavelengths; example; 100; nm; layer; aluminum; deposited; modifying; function; applications; reflective; surfaces; utilized; chromium-carbon; tungsten-carbon; layers; thickness; determined; intended; application; depositing material; optical element; optical elements; reflecting surface; desired shape; reflective surface; reflective surfaces; spherical surface; x-ray wavelengths; aspheric surface; aspheric optics; intended application; controlled deposition; ray wavelength; element formed; deep ultra-violet; /359/
Citation Formats
Hawryluk, Andrew M. Forming aspheric optics by controlled deposition. United States: N. p., 1998.
Web.
Hawryluk, Andrew M. Forming aspheric optics by controlled deposition. United States.
Hawryluk, Andrew M. Thu .
"Forming aspheric optics by controlled deposition". United States. https://www.osti.gov/servlets/purl/871511.
@article{osti_871511,
title = {Forming aspheric optics by controlled deposition},
author = {Hawryluk, Andrew M},
abstractNote = {An aspheric optical element formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin (.about.100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application.},
doi = {},
url = {https://www.osti.gov/biblio/871511},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}