Forming aspheric optics by controlled deposition

Patent · 31 December 1997

OSTI ID:871511

Hawryluk, Andrew M ^[1]

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1. Modesto, CA

An aspheric optical element formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin (.about.100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5745286
• OSTI ID: 871511
• Country of Publication: United States
• Language: English

Related Subjects

/359/
100
aluminum
application
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aspheric
aspheric optics
aspheric surface
chromium-carbon
controlled
controlled deposition
deep
deep ultra-violet
deposited
depositing
depositing material
deposition
desired
desired shape
determined
element
element formed
elements
evaporative
example
form
formed
forming
function
intended
intended application
layer
layers
material
modifying
multi-layer
nm
optical
optical element
optical elements
optics
ray wavelength
reflecting
reflecting surface
reflective
reflective surface
reflective surfaces
shape
single
spherical
spherical surface
sputtering
suitable
surface
surfaces
techniques
thickness
tungsten-carbon
ultra-violet
utilized
wavelengths
x-ray
x-ray wavelengths