Forming aspheric optics by controlled deposition

Patent · Tue Apr 28 04:00:00 EDT 1998

OSTI ID:644425

Hawryluk, A M

An aspheric optical element is disclosed formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin ({approx}100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application. 4 figs.

• Research Organization: University of California
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Univ. of California, Oakland, CA (United States)
• Patent Number(s): US 5,745,286/A/
• Application Number: PAN: 8-542,758
• OSTI ID: 644425
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
FABRICATION
GEOMETRICAL ABERRATIONS
LAYERS
OPTICAL SYSTEMS
ULTRAVIOLET RADIATION
X RADIATION