Forming aspheric optics by controlled deposition

Patent · Thu Jan 01 00:00:00 EST 1998

OSTI ID:871511

Hawryluk, Andrew M ^[1]

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1. Modesto, CA

An aspheric optical element formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin (.about.100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5745286
• OSTI ID: 871511
• Country of Publication: United States
• Language: English

Related Subjects

forming
aspheric
optics
controlled
deposition
optical
element
formed
depositing
material
spherical
surface
form
desired
shape
reflecting
single
multi-layer
evaporative
sputtering
techniques
elements
suitable
deep
ultra-violet
x-ray
wavelengths
example
100
nm
layer
aluminum
deposited
modifying
function
applications
reflective
surfaces
utilized
chromium-carbon
tungsten-carbon
layers
thickness
determined
intended
application
depositing material
optical element
optical elements
reflecting surface
desired shape
reflective surface
reflective surfaces
spherical surface
x-ray wavelengths
aspheric surface
aspheric optics
intended application
controlled deposition
ray wavelength
element formed
deep ultra-violet
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