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Ultrahigh vacuum focused ion beam micromill and articles therefrom

Patent ·
OSTI ID:871387
 [1];  [1]
  1. Los Alamos, NM
+ Show Author Affiliations
An ultrahigh vacuum focused ion beam micromilling apparatus and process are isclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters.
Research Organization:
Los Alamos National Laboratory (LANL), Los Alamos, NM
DOE Contract Number:
W-7405-ENG-36
Assignee:
Regents of University of California Office of Technology Transfer (Alameda, CA)
Patent Number(s):
US 5721687
OSTI ID:
871387
Country of Publication:
United States
Language:
English

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