Ultrahigh vacuum focused ion beam micromill and articles therefrom

Patent · Thu Jan 01 00:00:00 EST 1998

OSTI ID:871387

Lamartine, Bruce C ^[1]; Stutz, Roger A ^[1]

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1. Los Alamos, NM

An ultrahigh vacuum focused ion beam micromilling apparatus and process are isclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
• DOE Contract Number: W-7405-ENG-36
• Assignee: Regents of University of California Office of Technology Transfer (Alameda, CA)
• Patent Number(s): US 5721687
• OSTI ID: 871387
• Country of Publication: United States
• Language: English

Related Subjects

ultrahigh
vacuum
focused
beam
micromill
articles
therefrom
micromilling
apparatus
process
isclosed
additionally
durable
data
storage
medium
disclosed
capable
storing
digital
alphanumeric
characters
graphical
shapes
articles therefrom
durable data
medium capable
data storage
storage medium
vacuum focused
beam micromilling
alphanumeric characters
ultrahigh vacuum
micromilling apparatus
micromilling process
graphical shapes
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