Ultrahigh vacuum focused ion beam micromill and articles therefrom

Patent · Tue Feb 24 00:00:00 EST 1998

OSTI ID:570403

Lamartine, B C; Stutz, R A

An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. 6 figs.

• Research Organization: Univ. of California (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• Assignee: Univ. of California, Office of Technology Transfer, Alameda, CA (United States)
• Patent Number(s): US 5,721,687/A/
• Application Number: PAN: 8-382,345
• OSTI ID: 570403
• Resource Relation: Other Information: PBD: 24 Feb 1998
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
99 MATHEMATICS
COMPUTERS
INFORMATION SCIENCE
MANAGEMENT
LAW
MISCELLANEOUS
MEMORY DEVICES
MILLING MACHINES
ION BEAMS
MILLING
VACUUM SYSTEMS
MINIATURIZATION