Focused ion beam micromilling and articles therefrom

Patent · Tue Jun 30 00:00:00 EDT 1998

OSTI ID:672600

Lamartine, B C; Stutz, R A

An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. 6 figs.

• Research Organization: Univ. of California (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• Assignee: Univ. of California, Office of Technology Transfer, Alameda, CA (United States)
• Patent Number(s): US 5,773,116/A/
• Application Number: PAN: 8-695,326
• OSTI ID: 672600
• Resource Relation: Other Information: PBD: 30 Jun 1998
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
MILLING
ION BEAMS
MILLING MACHINES
DESIGN
MEMORY DEVICES