Diamond film growth from fullerene precursors

Gruen, Dieter M; Liu, Shengzhong; Krauss, Alan R; Pan, Xianzheng

Title: Diamond film growth from fullerene precursors

Patent · Wed Jan 01 00:00:00 EST 1997

OSTI ID:870901

Gruen, Dieter M ^[1]; Liu, Shengzhong ^[2]; Krauss, Alan R ^[3]; Pan, Xianzheng ^[2]

Downers Grove, IL
Woodridge, IL
Naperville, IL

A method and system for manufacturing diamond film. The method involves forming a fullerene vapor, providing a noble gas stream and combining the gas with the fullerene vapor, passing the combined fullerene vapor and noble gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

DOE Contract Number:: W-31109-ENG-38

Assignee:: University of Chicago (Chicago, IL)

Patent Number(s):: US 5620512

OSTI ID:: 870901

Country of Publication:: United States

Language:: English

References (19)

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Nucleation of diamond films on surfaces using carbon clusters Meilunas, R. J.; Chang, R. P. H.; Liu, Shengzhong Applied Physics Letters, Vol. 59, Issue 26 https://doi.org/10.1063/1.105678	journal	December 1991
Metastable Growth of Diamond and Diamond-Like Phases Angus, J. C.; Wang, Y.; Sunkara, M. Annual Review of Materials Science, Vol. 21, Issue 1 https://doi.org/10.1146/annurev.ms.21.080191.001253	journal	August 1991
Crushing C60 to diamond at room temperature Regueiro, Manual Núñez; Monceau, Pierre; Hodeau, Jean-Louis Nature, Vol. 355, Issue 6357 https://doi.org/10.1038/355237a0	journal	January 1992
Growth mechanism of vapor-deposited diamond Frenklach, Michael; Spear, Karl E. Journal of Materials Research, Vol. 3, Issue 1 https://doi.org/10.1557/JMR.1988.0133	journal	February 1988
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Fullerenes Curl, Robert F.; Smalley, Richard E. Scientific American, Vol. 265, Issue 4 https://doi.org/10.1038/scientificamerican1091-54	journal	October 1991
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Title: Diamond film growth from fullerene precursors

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References (19)

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