Diamond film growth argon-carbon plasmas

Gruen, Dieter M; Krauss, Alan R; Liu, Shengzhong; Pan, Xianzheng; Zuiker, Christopher D

Diamond film growth argon-carbon plasmas

Patent · Wed Dec 31 23:00:00 EST 1997

OSTI ID:872038

Gruen, Dieter M ^[1]; Krauss, Alan R ^[2]; Liu, Shengzhong ^[3]; Pan, Xianzheng ^[4]; Zuiker, Christopher D ^[5]

Downers Grove, IL
Naperville, IL
Canton, MI
Wuhan Hubei, CN
LaGrange, IL

A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL

DOE Contract Number:: W-31109-ENG-38

Assignee:: University of Chicago (Chicago, IL)

Patent Number(s):: US 5849079

OSTI ID:: 872038

Country of Publication:: United States

Language:: English

References (21)

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/117/423/427/
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Diamond film growth argon-carbon plasmas

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