Diamond film growth argon-carbon plasmas
Patent
·
OSTI ID:872038
- Downers Grove, IL
- Naperville, IL
- Canton, MI
- Wuhan Hubei, CN
- LaGrange, IL
A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- DOE Contract Number:
- W-31109-ENG-38
- Assignee:
- University of Chicago (Chicago, IL)
- Patent Number(s):
- US 5849079
- OSTI ID:
- 872038
- Country of Publication:
- United States
- Language:
- English
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film
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involves
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deposition
substrate
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method involves
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involves forming
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