Method for the preparation of nanocrystalline diamond thin films

Gruen, Dieter M; Krauss, Alan R

Title: Method for the preparation of nanocrystalline diamond thin films

Patent · Tue Jun 30 00:00:00 EDT 1998

OSTI ID:871657

Gruen, Dieter M ^[1]; Krauss, Alan R ^[2]

Downers Grove, IL
Naperville, IL

A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

DOE Contract Number:: W-31109-ENG-38

Assignee:: University Of Chicago (Chicago, IL)

Patent Number(s):: US 5772760

OSTI ID:: 871657

Country of Publication:: United States

Language:: English

References (15)

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First easily reproduced solution-phase synthesis and confirmation of superconductivity in the fullerene KxC60 (Tc = 18.0 .+-. 0.1 K) Wang, H. Hau; Kini, Aravinda M.; Savall, Brad M. Inorganic Chemistry, Vol. 30, Issue 14 https://doi.org/10.1021/ic00014a005	journal	July 1991
Nucleation of diamond films on surfaces using carbon clusters Meilunas, R. J.; Chang, R. P. H.; Liu, Shengzhong Applied Physics Letters, Vol. 59, Issue 26 https://doi.org/10.1063/1.105678	journal	December 1991
Metastable Growth of Diamond and Diamond-Like Phases Angus, J. C.; Wang, Y.; Sunkara, M. Annual Review of Materials Science, Vol. 21, Issue 1 https://doi.org/10.1146/annurev.ms.21.080191.001253	journal	August 1991
Crushing C60 to diamond at room temperature Regueiro, Manual Núñez; Monceau, Pierre; Hodeau, Jean-Louis Nature, Vol. 355, Issue 6357 https://doi.org/10.1038/355237a0	journal	January 1992
Growth mechanism of vapor-deposited diamond Frenklach, Michael; Spear, Karl E. Journal of Materials Research, Vol. 3, Issue 1 https://doi.org/10.1557/JMR.1988.0133	journal	February 1988
C60: Buckminsterfullerene Kroto, H. W.; Allaf, A. W.; Balm, S. P. Chemical Reviews, Vol. 91, Issue 6 https://doi.org/10.1021/cr00006a005	journal	September 1991
Superconductivity at 28.6 K in a rubidium-C60 fullerene compound, RbxC60, synthesized by a solution-phase technique Wang, H. Hau; Kini, Aravinda M.; Savall, Brad M. Inorganic Chemistry, Vol. 30, Issue 15 https://doi.org/10.1021/ic00015a004	journal	July 1991
Laser deposition of carbon clusters on surfaces: A new approach to the study of Fullerenes Meijer, Gerard; Bethune, Donald S. The Journal of Chemical Physics, Vol. 93, Issue 11 https://doi.org/10.1063/1.459360	journal	December 1990
Fullerenes Curl, Robert F.; Smalley, Richard E. Scientific American, Vol. 265, Issue 4 https://doi.org/10.1038/scientificamerican1091-54	journal	October 1991
Delayed electron emission from photoexcited C ₆₀ Wurz, Peter; Lykke, Keith R. The Journal of Chemical Physics, Vol. 95, Issue 9 https://doi.org/10.1063/1.461046	journal	November 1991
Diamond Film Semiconductors Geis, Michael W.; Angus, John C. Scientific American, Vol. 267, Issue 4 https://doi.org/10.1038/scientificamerican1092-84	journal	October 1992
Fabrication and Characterization of Diamond-Clad Silicon Field Emitter Arrays Cheng, Huang-Chung; Ku, Tzu-Kun; Hsieh, Biing-Bang Japanese Journal of Applied Physics, Vol. 34, Issue Part 1, No. 12B https://doi.org/10.1143/JJAP.34.6926	journal	December 1995
Resilience of all-carbon molecules C60, C70, and C84: a surface-scattering time-of-flight investigation Beck, Rainer D.; St. John, Pamela; Alvarez, Marcos M. The Journal of Physical Chemistry, Vol. 95, Issue 21 https://doi.org/10.1021/j100174a066	journal	October 1991
Solid C60: a new form of carbon Krätschmer, W.; Lamb, Lowell D.; Fostiropoulos, K. Nature, Vol. 347, Issue 6291 https://doi.org/10.1038/347354a0	journal	September 1990

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Related Subjects

method
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nanocrystalline
diamond
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manufacturing
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field
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tips
involves
forming
carbonaceous
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providing
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argon
hydrocarbon
possibly
hydrogen
combining
passing
combined
carrier
chamber
plasma
causing
fragmentation
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method involves
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field emission
diamond film
involves forming
carbonaceous vapor
carrier stream
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chamber causing
nanocrystalline diamond
method involve
gas carrier
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Title: Method for the preparation of nanocrystalline diamond thin films

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References (15)

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