Method for the preparation of nanocrystalline diamond thin films

Gruen, Dieter M; Krauss, Alan R

Method for the preparation of nanocrystalline diamond thin films

Patent · Tue Jun 30 00:00:00 EDT 1998

OSTI ID:871657

Gruen, Dieter M ^[1]; Krauss, Alan R ^[2]

Downers Grove, IL
Naperville, IL

A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL

DOE Contract Number:: W-31109-ENG-38

Assignee:: University Of Chicago (Chicago, IL)

Patent Number(s):: US 5772760

OSTI ID:: 871657

Country of Publication:: United States

Language:: English

References (15)

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Laser deposition of carbon clusters on surfaces: A new approach to the study of Fullerenes Meijer, Gerard; Bethune, Donald S. The Journal of Chemical Physics, Vol. 93, Issue 11 https://doi.org/10.1063/1.459360	journal	December 1990
Nucleation of diamond films on surfaces using carbon clusters Meilunas, R. J.; Chang, R. P. H.; Liu, Shengzhong Applied Physics Letters, Vol. 59, Issue 26 https://doi.org/10.1063/1.105678	journal	December 1991
Crushing C60 to diamond at room temperature Regueiro, Manual Núñez; Monceau, Pierre; Hodeau, Jean-Louis Nature, Vol. 355, Issue 6357 https://doi.org/10.1038/355237a0	journal	January 1992
First easily reproduced solution-phase synthesis and confirmation of superconductivity in the fullerene KxC60 (Tc = 18.0 .+-. 0.1 K) Wang, H. Hau; Kini, Aravinda M.; Savall, Brad M. Inorganic Chemistry, Vol. 30, Issue 14 https://doi.org/10.1021/ic00014a005	journal	July 1991
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/117/427/
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gas carrier
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hydrocarbon
hydrogen
involves
involves forming
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method involves
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Method for the preparation of nanocrystalline diamond thin films

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