Diamond film growth from fullerene precursors
Abstract
A method and system for manufacturing diamond film. The method involves forming a fullerene vapor, providing a noble gas stream and combining the gas with the fullerene vapor, passing the combined fullerene vapor and noble gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate.
- Inventors:
-
- Downers Grove, IL
- Woodridge, IL
- Naperville, IL
- Publication Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 870901
- Patent Number(s):
- US 5620512
- Assignee:
- University of Chicago (Chicago, IL)
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- diamond; film; growth; fullerene; precursors; method; manufacturing; involves; forming; vapor; providing; noble; gas; stream; combining; passing; combined; carrier; chamber; plasma; causing; fragmentation; deposition; substrate; film growth; method involves; gas stream; diamond film; noble gas; involves forming; carrier stream; causing fragmentation; chamber causing; fullerene vapor; method involve; gas carrier; manufacturing diamond; /117/423/
Citation Formats
Gruen, Dieter M, Liu, Shengzhong, Krauss, Alan R, and Pan, Xianzheng. Diamond film growth from fullerene precursors. United States: N. p., 1997.
Web.
Gruen, Dieter M, Liu, Shengzhong, Krauss, Alan R, & Pan, Xianzheng. Diamond film growth from fullerene precursors. United States.
Gruen, Dieter M, Liu, Shengzhong, Krauss, Alan R, and Pan, Xianzheng. 1997.
"Diamond film growth from fullerene precursors". United States. https://www.osti.gov/servlets/purl/870901.
@article{osti_870901,
title = {Diamond film growth from fullerene precursors},
author = {Gruen, Dieter M and Liu, Shengzhong and Krauss, Alan R and Pan, Xianzheng},
abstractNote = {A method and system for manufacturing diamond film. The method involves forming a fullerene vapor, providing a noble gas stream and combining the gas with the fullerene vapor, passing the combined fullerene vapor and noble gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate.},
doi = {},
url = {https://www.osti.gov/biblio/870901},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jan 01 00:00:00 EST 1997},
month = {Wed Jan 01 00:00:00 EST 1997}
}
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