Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets
Patent
·
OSTI ID:869955
- Livermore, CA
- Hayward, CA
An improved method for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite's high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 5428882
- OSTI ID:
- 869955
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
/29/156/204/219/228/419/427/
ability
aluminum
aluminum metal
anisotropic
anisotropic pyrolytic
bonding
brazing
casting
coating
compaction
conductive
conductive metal
conductivity
conductivity planes
contact
contact surface
contoured
deposition
energy
energy transmission
erosion
eutectic
fabricating
fabrication
graphite
graphite contact
graphite sputtering
heat
heat transfer
hrpvd
improved
improved method
joined
laser
laser weld
laser welding
life
liquid-metal
low-temperature
match
maximum
maximum energy
metal
metal casting
metallized
metallurgy
method
methods
oriented
physical
physical vapor
planes
powder
powder metallurgy
process
profile
pyrolytic
pyrolytic graphite
rate
segmented
sputter
sputter target
sputtering
sputtering targets
superior
superior heat
surface
target
targets
temperature bonding
thermal
thermal conductivity
thermally
thermally conductive
transfer
transmission
vapor
vapor deposition
welding
ability
aluminum
aluminum metal
anisotropic
anisotropic pyrolytic
bonding
brazing
casting
coating
compaction
conductive
conductive metal
conductivity
conductivity planes
contact
contact surface
contoured
deposition
energy
energy transmission
erosion
eutectic
fabricating
fabrication
graphite
graphite contact
graphite sputtering
heat
heat transfer
hrpvd
improved
improved method
joined
laser
laser weld
laser welding
life
liquid-metal
low-temperature
match
maximum
maximum energy
metal
metal casting
metallized
metallurgy
method
methods
oriented
physical
physical vapor
planes
powder
powder metallurgy
process
profile
pyrolytic
pyrolytic graphite
rate
segmented
sputter
sputter target
sputtering
sputtering targets
superior
superior heat
surface
target
targets
temperature bonding
thermal
thermal conductivity
thermally
thermally conductive
transfer
transmission
vapor
vapor deposition
welding