Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets

Patent · Sun Jan 01 00:00:00 EST 1995

OSTI ID:869955

Makowiecki, Daniel M ^[1]; Ramsey, Philip B ^[1]; Juntz, Robert S ^[2]

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1. Livermore, CA
2. Hayward, CA

An improved method for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite's high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5428882
• OSTI ID: 869955
• Country of Publication: United States
• Language: English

Related Subjects

process
fabrication
aluminum
metallized
pyrolytic
graphite
sputtering
targets
improved
method
fabricating
superior
heat
transfer
ability
life
maximum
energy
transmission
anisotropic
contoured
segmented
match
erosion
profile
sputter
target
oriented
thermal
conductivity
planes
contact
thermally
conductive
metal
surface
rate
physical
vapor
deposition
hrpvd
coating
joined
low-temperature
bonding
methods
liquid-metal
casting
powder
metallurgy
compaction
eutectic
brazing
laser
welding
pyrolytic graphite
metal casting
maximum energy
sputtering targets
laser welding
contact surface
improved method
thermal conductivity
heat transfer
vapor deposition
physical vapor
thermally conductive
conductive metal
sputter target
aluminum metal
powder metallurgy
laser weld
energy transmission
graphite sputtering
superior heat
graphite contact
temperature bonding
anisotropic pyrolytic
conductivity planes
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