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Method of making segmented pyrolytic graphite sputtering targets

Patent ·
OSTI ID:869148
 [1];  [2];  [1];  [1]
  1. Livermore, CA
  2. Tracy, CA
+ Show Author Affiliations

Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
DOE Contract Number:
W-7405-ENG-48
Assignee:
Regents of University of California (Oakland, CA)
Patent Number(s):
US 5284539
OSTI ID:
869148
Country of Publication:
United States
Language:
English

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Related Subjects

/156/204/
allow
anisotropic
anisotropic pyrolytic
bonded
conduction
conductivity
conductivity planes
energy
energy transmission
graphite
graphite sputtering
heat
heat conduction
maximized
maximum
maximum energy
method
optimum
oriented
planes
pyrolytic
pyrolytic graphite
segmented
sputter
sputter target
sputtering
sputtering targets
surface
target
targets
thermal
thermal conductivity
transmission
wafers