Filtered cathodic arc source

Patent · Sat Jan 01 04:00:00 EST 1994

OSTI ID:869128

Falabella, Steven ^[1]; Sanders, David M ^[1]

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1. Livermore, CA

A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: as represented by United States Department of Energy (Washington, DC)
• Patent Number(s): US 5279723
• OSTI ID: 869128
• Country of Publication: United States
• Language: English

Related Subjects

/204/250/313/427/
45
axial
axial magnetic
baffles
bent
capable
cathode
cathodic
coated
confine
consists
continuous
coupled
degree
discharge
electrons
elimination
employs
field
filter
filtered
filtered cathodic
flow
flux
flux produced
guide
line-of-sight
macro-particle
macro-particles
magnetic
magnetic field
material
metal
particle filter
path
placed
prevents
produced
provides
providing
separation
series
solenoids
source
source coupled
spot
straight
tapered
target
target mater
target material
trapping
utilization