Filtered cathodic arc deposition apparatus and method

Patent · Fri Jan 01 04:00:00 EST 1999

OSTI ID:872279

Krauss, Alan R ^[1]

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1. 24461 W. Blvd. De John, Naperville, IL 60564

A filtered cathodic arc deposition method and apparatus for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by the transverse magnetic field, along the initial path of the plasma stream to a macro particle deflector. The macro particle deflector has a preformed surface which deflects macro particles away from the substrate.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL
• DOE Contract Number: W-31109-ENG-38
• Assignee: Krauss; Alan R. (24461 W. Blvd. De John, Naperville, IL 60564)
• Patent Number(s): US 5902462
• OSTI ID: 872279
• Country of Publication: United States
• Language: English

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