Filtered cathodic arc deposition apparatus and method

Patent · Fri Jan 01 00:00:00 EST 1999

OSTI ID:872279

Krauss, Alan R ^[1]

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1. 24461 W. Blvd. De John, Naperville, IL 60564

A filtered cathodic arc deposition method and apparatus for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by the transverse magnetic field, along the initial path of the plasma stream to a macro particle deflector. The macro particle deflector has a preformed surface which deflects macro particles away from the substrate.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• DOE Contract Number: W-31109-ENG-38
• Assignee: Krauss; Alan R. (24461 W. Blvd. De John, Naperville, IL 60564)
• Patent Number(s): US 5902462
• OSTI ID: 872279
• Country of Publication: United States
• Language: English

Related Subjects

filtered
cathodic
deposition
apparatus
method
production
highly
dense
wear
resistant
coatings
free
macro
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shaped
vacuum
chamber
houses
cathode
target
evaporable
surface
comprised
coating
material
means
generating
stream
plasma
transverse
magnetic
field
particle
deflector
bends
generated
direction
substrate
effectively
traveling
unaffected
initial
path
preformed
deflects
resistant coating
deposition method
coating material
vacuum chamber
magnetic field
transverse magnetic
resistant coatings
deposition apparatus
wear resistant
filtered cathodic
highly dense
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