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Title: Filters for cathodic arc plasmas

Abstract

Cathodic arc plasmas are contaminated with macroparticles. A variety of magnetic plasma filters has been used with various success in removing the macroparticles from the plasma. An open-architecture, bent solenoid filter, with additional field coils at the filter entrance and exit, improves macroparticle filtering. In particular, a double-bent filter that is twisted out of plane forms a very compact and efficient filter. The coil turns further have a flat cross-section to promote macroparticle reflection out of the filter volume. An output conditioning system formed of an expander coil, a straightener coil, and a homogenizer, may be used with the magnetic filter for expanding the filtered plasma beam to cover a larger area of the target. A cathodic arc plasma deposition system using this filter can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.

Inventors:
 [1];  [2];  [3];  [4]
  1. (Albany, CA)
  2. (Richmond, CA)
  3. (Engadine, AU)
  4. (Berkeley, CA)
Publication Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
OSTI Identifier:
874808
Patent Number(s):
US 6465780
Assignee:
The Regents of the University of California (Oakland, CA) LBNL
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
filters; cathodic; plasmas; contaminated; macroparticles; variety; magnetic; plasma; success; removing; open-architecture; bent; solenoid; filter; additional; field; coils; entrance; exit; improves; macroparticle; filtering; double-bent; twisted; plane; forms; compact; efficient; coil; flat; cross-section; promote; reflection; volume; output; conditioning; formed; expander; straightener; homogenizer; expanding; filtered; beam; cover; larger; target; deposition; ultrathin; amorphous; hard; carbon; a-c; films; storage; industry; magnetic filter; /250/

Citation Formats

Anders, Andre, MacGill, Robert A., Bilek, Marcela M. M., and Brown, Ian G. Filters for cathodic arc plasmas. United States: N. p., 2002. Web.
Anders, Andre, MacGill, Robert A., Bilek, Marcela M. M., & Brown, Ian G. Filters for cathodic arc plasmas. United States.
Anders, Andre, MacGill, Robert A., Bilek, Marcela M. M., and Brown, Ian G. Tue . "Filters for cathodic arc plasmas". United States. https://www.osti.gov/servlets/purl/874808.
@article{osti_874808,
title = {Filters for cathodic arc plasmas},
author = {Anders, Andre and MacGill, Robert A. and Bilek, Marcela M. M. and Brown, Ian G.},
abstractNote = {Cathodic arc plasmas are contaminated with macroparticles. A variety of magnetic plasma filters has been used with various success in removing the macroparticles from the plasma. An open-architecture, bent solenoid filter, with additional field coils at the filter entrance and exit, improves macroparticle filtering. In particular, a double-bent filter that is twisted out of plane forms a very compact and efficient filter. The coil turns further have a flat cross-section to promote macroparticle reflection out of the filter volume. An output conditioning system formed of an expander coil, a straightener coil, and a homogenizer, may be used with the magnetic filter for expanding the filtered plasma beam to cover a larger area of the target. A cathodic arc plasma deposition system using this filter can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}

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