Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices

Patent · Sat Dec 31 23:00:00 EST 1988

OSTI ID:867143

Kazmerski, Lawrence L ^[1]

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1. Lakewood, CO

A method and apparatus is disclosed for obtaining and mapping chemical compositional data for solid devices. It includes a SIMS mass analyzer or similar system capable of being rastered over a surface of the solid to sample the material at a pattern of selected points, as the surface is being eroded away by sputtering or a similar process. The data for each point sampled in a volume of the solid is digitally processed and indexed by element or molecule type, exact spacial location within the volume, and the concentration levels of the detected element or molecule types. This data can then be recalled and displayed for any desired planar view in the volume.

• Research Organization: MIDWEST RESEARCH INSTITUTE
• DOE Contract Number: AC02-83CH10093
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4874946
• OSTI ID: 867143
• Country of Publication: United States
• Language: English

Related Subjects

/250/
analyzer
analyzing
apparatus
capable
chemical
chemical composition
chemistry
compositional
concentration
concentration level
concentration levels
data
desired
detected
devices
digitally
disclosed
displayed
element
eroded
exact
indexed
internal
levels
location
mapping
mass
mass analyzer
material
materials
method
molecule
obtaining
pattern
planar
process
processed
rastered
recalled
sample
sampled
selected
similar
sims
solid
spacial
sputtering
surface
type
types
variations
view
volume