Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices
Patent
·
OSTI ID:5559895
A method and apparatus is disclosed for obtaining and mapping chemical compositional data for solid devices. It includes a SIMS mass analyzer or similar system capable of being rastered over a surface of the solid to sample the material at a pattern of selected points, as the surface is beingeroded away by sputtering or a similar process. The data for each point sampled in a volume of the solid is digitally processed and indexed by element or molecule type, exact spacial location within the volume, and the concentration levels of the detected element or molecule types. This data can then be recalled and displayed for any desired planar view in the volume.
- Assignee:
- Dept. of Energy, Washington, DC
- Patent Number(s):
- A; US 4874946
- Application Number:
- PPN: US 6-728970A
- OSTI ID:
- 5559895
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102* -- Chemical & Spectral Procedures
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL COMPOSITION
CONTROL
DATA PROCESSING
DIGITAL SYSTEMS
MATERIALS
MEASURING INSTRUMENTS
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PROCESS CONTROL
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400102* -- Chemical & Spectral Procedures
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL COMPOSITION
CONTROL
DATA PROCESSING
DIGITAL SYSTEMS
MATERIALS
MEASURING INSTRUMENTS
PLASMA
PROCESS CONTROL
PROCESSING
SOLID-STATE PLASMA
SPUTTERING
STRUCTURAL CHEMICAL ANALYSIS
SURFACES