Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices
Patent
·
OSTI ID:5656825
A method and apparatus is disclosed for obtaining and mapping chemical compositional data for solid devices. It includes a SIMS mass analyzer or similar system capable of being rastered over a surface of the solid to sample the material at a pattern of selected points, as the surface is being eroded away by sputtering or a similar process. The data for each point sampled in a volume of the solid is digitally processed and indexed by element or molecule type, exact spacial location within the volume, and the concentration levels of the detected element or molecule types. This data can then be recalled and displayed for any desired planar view in the volume.
- Research Organization:
- Solar Energy Research Inst., Golden, CO (USA)
- DOE Contract Number:
- AC02-83CH10093
- Assignee:
- Dept. of Energy
- Patent Number(s):
- None
- Application Number:
- ON: DE86013707
- OSTI ID:
- 5656825
- Country of Publication:
- United States
- Language:
- English
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