Superconducting structure with layers of niobium nitride and aluminum nitride
- Lisle, IL
- Lauris, FR
- Woodridge, IL
- Evanston, IL
A superconducting structure is formed by depositing alternate layers of aluminum nitride and niobium nitride on a substrate. Deposition methods include dc magnetron reactive sputtering, rf magnetron reactive sputtering, thin-film diffusion, chemical vapor deposition, and ion-beam deposition. Structures have been built with layers of niobium nitride and aluminum nitride having thicknesses in a range of 20 to 350 Angstroms. Best results have been achieved with films of niobium nitride deposited to a thickness of approximately 70 Angstroms and aluminum nitride deposited to a thickness of approximately 20 Angstroms. Such films of niobium nitride separated by a single layer of aluminum nitride are useful in forming Josephson junctions. Structures of 30 or more alternating layers of niobium nitride and aluminum nitride are useful when deposited on fixed substrates or flexible strips to form bulk superconductors for carrying electric current. They are also adaptable as voltage-controlled microwave energy sources.
- Research Organization:
- WELSH & KATZ
- DOE Contract Number:
- AC02-84GC20057
- Assignee:
- University of Chicago (Arch Development Corp.) (Chicago, IL)
- Patent Number(s):
- US 4844989
- OSTI ID:
- 867023
- Country of Publication:
- United States
- Language:
- English
Similar Records
Effects of methane in the deposition of superconducting niobium nitride thin films at ambient substrate temperature
NbN tunnel junctions
Related Subjects
20
30
350
70
achieved
adaptable
alternate
alternate layers
alternating
alternating layers
aluminum
aluminum nitride
angstroms
approximately
beam deposition
built
bulk
carrying
chemical
chemical vapor
current
dc
dc magnet
dc magnetron
deposited
depositing
depositing alternate
deposition
deposition method
deposition methods
diffusion
electric
electric current
energy
energy source
energy sources
films
fixed
flexible
flexible strips
form
formed
forming
ion-beam
josephson
josephson junction
josephson junctions
junctions
layer
layers
magnetron
methods
microwave
microwave energy
niobium
niobium nitride
nitride
range
reactive
reactive sputtering
results
rf
rf magnetron
separated
single
single layer
sources
sputtering
strips
structure
structures
substrate
substrates
superconducting
superconducting structure
superconductors
thickness
thicknesses
thin-film
useful
vapor
vapor deposition
voltage-controlled
wave energy