Effects of methane in the deposition of superconducting niobium nitride thin films at ambient substrate temperature

Journal Article · Tue Feb 01 04:00:00 EST 1983 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.332117· OSTI ID:6631045

Cukauskas, E J

Thin films of the niobium-carbon-nitrogen system have been prepared at ambient substrate temperature by rf diode reactive sputtering in an argon-nitrogen atmosphere with controlled amounts of methane added to the sputter gas. Superconducting transition temperatures ranged from approximately 11 to 15.85 /sup 0/K. Auger and x-ray diffraction analysis indicate that all films were of the single phase B1 structure with a small amount of ..beta..-phase hexagonal structure in the very low carbon containing films. A correlation of the superconducting properties, room temperature sheet resistance, preferred crystallite orientation, and film composition was observed. The results of this investigation show that high T/sub c/ niobium nitride/niobium carbonitride thin films can be prepared at ambient substrate temperatures with the proper amount of nitrogen and methane partial pressures during film deposition. These films have potential application for the fabrication of high T/sub c/ Josephson tunnel junctions.

• Research Organization: Microwave Technology Branch, Electronics Technology Division, Naval Research Laboratory, Washington, DC 20375
• OSTI ID: 6631045
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 54:2; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656102 -- Solid State Physics-- Superconductivity-- Acoustic
Electronic
Magnetic
Optical
& Thermal Phenomena-- (-1987)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKANES
ARGON
AUGER ELECTRON SPECTROSCOPY
CARBIDES
CARBON COMPOUNDS
CHEMICAL REACTIONS
COHERENT SCATTERING
CONTROL
CRYSTAL STRUCTURE
DEPOSITION
DIFFRACTION
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON SPECTROSCOPY
ELEMENTS
FILMS
FLUIDS
GASES
HYDROCARBONS
JOSEPHSON JUNCTIONS
JUNCTIONS
METHANE
NIOBIUM CARBIDES
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NONMETALS
ORGANIC COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
RARE GASES
SCATTERING
SPECTROSCOPY
SPUTTERING
SUBSTRATES
SUPERCONDUCTING FILMS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THICKNESS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
ULTRALOW TEMPERATURE
X-RAY DIFFRACTION