Method for forming high superconducting T/sub c/ niobium nitride film at ambient temperatures
Patent
·
OSTI ID:5413181
This report contains a method of forming a high TC niobium nitride (NbN) film on a substrate at ambient substrate temperature. The method includes the step of reactively sputtering NbN onto the substrate in an argon-nitrogen atmosphere with controlled amounts of methane added to the argon-nitrogen gas mixture.
- Assignee:
- EDB-84-036689; ERA-09-012380
- Patent Number(s):
- None
- OSTI ID:
- 5413181
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
656102 -- Solid State Physics-- Superconductivity-- Acoustic
Electronic
Magnetic
Optical
& Thermal Phenomena-- (-1987)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKANES
ARGON
ATMOSPHERES
DEPOSITION
DISPERSIONS
ELECTRODES
ELEMENTS
FILMS
FLUIDS
GASES
HYDROCARBONS
JOSEPHSON JUNCTIONS
JUNCTIONS
METHANE
MIXTURES
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NONMETALS
ORGANIC COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
RARE GASES
SPUTTERING
SUBSTRATES
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
656102 -- Solid State Physics-- Superconductivity-- Acoustic
Electronic
Magnetic
Optical
& Thermal Phenomena-- (-1987)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKANES
ARGON
ATMOSPHERES
DEPOSITION
DISPERSIONS
ELECTRODES
ELEMENTS
FILMS
FLUIDS
GASES
HYDROCARBONS
JOSEPHSON JUNCTIONS
JUNCTIONS
METHANE
MIXTURES
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NONMETALS
ORGANIC COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
RARE GASES
SPUTTERING
SUBSTRATES
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE