Process and apparatus for formation of photovoltaic compounds

Patent · Mon Dec 31 23:00:00 EST 1984

OSTI ID:865500

Hall, Robert B ^[1]; Rocheleau, Richard E ^[2]

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1. Newark, DE
2. Wilmington, DE

The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn.sub.x Cd.sub.1-x S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.

• Research Organization: National Renewable Energy Laboratory (NREL), Golden, CO
• DOE Contract Number: EG-77-C-01-4042
• Assignee: University of Delaware (Newark, DE)
• Patent Number(s): US 4526809
• OSTI ID: 865500
• Country of Publication: United States
• Language: English

Related Subjects

/438/117/136/427/
1-x
apparatus
cadmium
cd
characterized
combined
compound
compounds
deposition
elements
evaporation
films
fixed
form
formation
intended
photovoltaic
preselected
process
proportional
rate
rates
ratio
relates
required
stoichiometric
stoichiometric ratio
stoichiometry
substrate
sulfur
twice
vacuum
zinc
zn