Process and apparatus for formation of photovoltaic compounds

Patent · Tue Jan 01 00:00:00 EST 1985

OSTI ID:865500

Hall, Robert B ^[1]; Rocheleau, Richard E ^[2]

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1. Newark, DE
2. Wilmington, DE

The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn.sub.x Cd.sub.1-x S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.

• Research Organization: National Renewable Energy Laboratory (NREL), Golden, CO (United States)
• DOE Contract Number: EG-77-C-01-4042
• Assignee: University of Delaware (Newark, DE)
• Patent Number(s): US 4526809
• OSTI ID: 865500
• Country of Publication: United States
• Language: English

Related Subjects

process
apparatus
formation
photovoltaic
compounds
relates
deposition
films
substrate
vacuum
evaporation
elements
form
zn
cd
1-x
compound
preselected
fixed
ratio
cadmium
zinc
characterized
rate
proportional
stoichiometric
intended
sulfur
twice
combined
rates
required
stoichiometry
stoichiometric ratio
/438/117/136/427/