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Electron beam cutting

Patent ·
OSTI ID:865396
 [1];  [2]
  1. Champaign, IL
  2. Abingdon, GB2
+ Show Author Affiliations
A method for the cutting of holes 20 Angstroms in diameter, or lines 20 Angstroms wide in a material having positive ionic conduction by the use of a focused electron probe is described. The holes and lines are stable under ambient conditions.
Research Organization:
University of Illinois
DOE Contract Number:
AC02-76ER01198
Assignee:
University Patents, Inc. (Westport, CT)
Patent Number(s):
US 4508952
Application Number:
06/467,559
OSTI ID:
865396
Country of Publication:
United States
Language:
English

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Related Subjects

/219/
20
ambient
ambient conditions
angstroms
beam
conditions
conduction
cutting
described
diameter
electron
electron beam
focused
focused electron
holes
ionic
ionic conduction
lines
material
method
positive
probe
stable
wide