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Electron beam cutting

Patent ·
OSTI ID:7249379
A method for the cutting of holes 20 Angstroms in diameter, or lines 20 Angstroms wide in a material having positive ionic conduction by the use of a focused electron probe is described. The holes and lines are stable under ambient conditions. 2 figs.
DOE Contract Number:
AC02-76ER01198
Assignee:
Univ. Patents, Inc., Westport, CT (United States)
Patent Number(s):
A; US 4508952
Application Number:
PPN: US 6-467559
OSTI ID:
7249379
Country of Publication:
United States
Language:
English

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