Electron beam cutting in amorphous alumina sheets

Journal Article · Thu Mar 01 04:00:00 EST 1984 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.94812· OSTI ID:5184272

Mochel, M E; Eades, J A; Metzger, M; Meyer, J I; Mochel, J M

We have found that nanometer diameter holes and slots can be cut in thin sheets of amorphous alumina using an intense electron beam. The holes, formed by a nonthermal process, are uniform in diameter, are surrounded by metallic aluminum, and can penetrate a 100-nm sheet in a few seconds. The amorphous alumina sheets are formed by anodization of electropolished high purity aluminum. The electron beam cutting seems very similar to the process reported in the metal ..beta..-aluminas. Since uniform, stable, and easily handled sheets of amorphous alumina can be fabricated and electron beam cut, this process is now practical for nanolithography as well as many other applications.

• Research Organization: Department of Metallurgy and Mining, Department of Physics and Materials Research Laboratory, University of Illinois at Urbana--Champaign, Urbana, Illinois 61801
• DOE Contract Number: AC02-76ER01198
• OSTI ID: 5184272
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 44:5; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
AMORPHOUS STATE
BEAMS
CAVITIES
CHALCOGENIDES
CHEMICAL REACTIONS
CUTTING
ELECTRON BEAM MACHINING
ELECTRON BEAMS
ELECTRONIC CIRCUITS
FILMS
FOILS
LEPTON BEAMS
MACHINING
OXIDATION
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PLATES
PRINTED CIRCUITS
SIZE