Cutting of 20A holes and lines in metal-. beta. -aluminas

Journal Article · Sat Jan 01 04:00:00 EST 1983 · Proc. - Annu. Meet., Electron Microsc. Soc. Am.; (United States)

OSTI ID:5853683

Mochel, M E; Humphreys, C J; Mochel, J M; Eades, J A

Holes 20A in diameter and fine lines 20A wide can be cut in the metal-..beta..-aluminas using the 10A electron beam of the Vacuum Generators, HB5 scanning transmission electron microscope. The minimum current density required for cutting was 10/sup 3/ amp/cm/sup 2/. Electron energies of 40, 60, 80, and 100 keV were used. In the case reported here, uniform 20A holes and lines were cut through self-supporting 1000A thick slabs of sodium-..beta..-alumina to provide very high electron contrast. Once cut, the ..beta..-aluminas are stable and will tolerate exposure to air without degradation of the electron cut patterns. They may be used directly as masks (eg. for ion implantation). They could probably be cut on the substrate with no damage to the underlying material. These specimens, once cut, can be removed from the microscope and stored, then returned for further cutting or viewing. 6 references, 3 figures.

• Research Organization: Univ. of Illinois, Urbana
• DOE Contract Number: AC02-76ER01198
• OSTI ID: 5853683
• Journal Information: Proc. - Annu. Meet., Electron Microsc. Soc. Am.; (United States), Journal Name: Proc. - Annu. Meet., Electron Microsc. Soc. Am.; (United States) Vol. 41; ISSN EMSPA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALKALI METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
CUTTING
ELECTRON BEAM MACHINING
MACHINING
OXIDES
OXYGEN COMPOUNDS
SLABS
SODIUM COMPOUNDS