Electron beam writing on a 20-A scale in metal. beta. -aluminas

Journal Article · Tue Feb 15 04:00:00 EST 1983 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.93918· OSTI ID:6542476

Mochel, M E; Humphreys, C J; Eades, J A; Mochel, J M; Petford, A M

Holes 20 A diameter and lines 20 A wide can be cut in sodium ..beta..-alumina, sodium ..beta..'' alumina, lithium ..beta..-alumina, potassium ..beta..-alumina, lead ..beta..-alumina, and silver ..beta..-alumina using a small focused electron probe (approximately 10/sup 4/ A/cm/sup 2/). Drilling can proceed along any crystal direction in the specimen and can penetrate material more than 1000 A thick maintaining the small (20 A) diameter. The holes and lines remain stable and the specimen can be removed from the electron microscope and replaced later for further drilling or examination at reduced beam intensities.

• Research Organization: Department of Physics and Materials Research Laboratory, University of Illinois at Urbana--Champaign, Urbana, Illinois 61801
• DOE Contract Number: AC02-76ER01198
• OSTI ID: 6542476
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 42:4; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360106* -- Metals & Alloys-- Radiation Effects
ALKALI METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
APERTURES
CHALCOGENIDES
DRILLING
ELECTRON MICROSCOPY
ELECTRONS
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
FOCUSING
LEAD COMPOUNDS
LEPTONS
LITHIUM COMPOUNDS
METALS
MICROSCOPY
OPENINGS
ORIENTATION
OXIDES
OXYGEN COMPOUNDS
PHYSICAL RADIATION EFFECTS
POTASSIUM COMPOUNDS
RADIATION EFFECTS
SILVER COMPOUNDS
SIZE
SODIUM COMPOUNDS
STABILITY
TRANSITION ELEMENT COMPOUNDS