Sextupole system for the correction of spherical aberration
Patent
·
OSTI ID:864063
- Palos Park, IL
- Chicago, IL
A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL
- DOE Contract Number:
- EY-76-S-02-2398
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4303864
- OSTI ID:
- 864063
- Country of Publication:
- United States
- Language:
- English
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