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Title: Sextupole system for the correction of spherical aberration

Patent ·
OSTI ID:5371327

In an electron beam device in which an electron beam is developed and then focused by a lens to a particular spot, there is provided a means for eliminating spherical aberration. A sextupole electromagnetic lens is positioned between two focusing lenses. The interaction of the sextupole with the beam compensates for spherical aberration. (GHT)

DOE Contract Number:
EY-76-S-02-2398
Assignee:
EDB-82-110339
OSTI ID:
5371327
Country of Publication:
United States
Language:
English