Sextupole system for the correction of spherical aberration
Patent
·
OSTI ID:5371327
In an electron beam device in which an electron beam is developed and then focused by a lens to a particular spot, there is provided a means for eliminating spherical aberration. A sextupole electromagnetic lens is positioned between two focusing lenses. The interaction of the sextupole with the beam compensates for spherical aberration. (GHT)
- DOE Contract Number:
- EY-76-S-02-2398
- Assignee:
- EDB-82-110339
- Patent Number(s):
- None
- OSTI ID:
- 5371327
- Country of Publication:
- United States
- Language:
- English
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