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U.S. Department of Energy
Office of Scientific and Technical Information

Multiple sextupole system for the correction of third and higher order aberration

Patent ·
OSTI ID:864589
A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.
Research Organization:
Argonne National Laboratory (ANL), Argonne, IL
DOE Contract Number:
EY-76-S-02-2398
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4389571
OSTI ID:
864589
Country of Publication:
United States
Language:
English