Multiple sextupole system for the correction of third and higher order aberration
Patent
·
OSTI ID:864589
- Palos Park, IL
A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL
- DOE Contract Number:
- EY-76-S-02-2398
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4389571
- OSTI ID:
- 864589
- Country of Publication:
- United States
- Language:
- English
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