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Sextupole system for the correction of spherical aberration

Patent ·
OSTI ID:5506319
;
A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.
Assignee:
Dept. of Energy
Patent Number(s):
US 4303864
OSTI ID:
5506319
Country of Publication:
United States
Language:
English

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Related Subjects

440103* -- Radiation Instrumentation-- Nuclear Spectroscopic Instrumentation
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BEAM OPTICS
CHARGED PARTICLES
CORRECTIONS
ELECTRON BEAM MACHINING
GEOMETRICAL ABERRATIONS
HEXAPOLES
MACHINING
MULTIPOLES
OPTICAL SYSTEMS