Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering
Journal Article
·
· Journal of Vacuum Science and Technology
- SLAC
No abstract prepared.
- Research Organization:
- Stanford Linear Accelerator Center, Menlo Park, CA (US)Stanford Synchrotron Radiation Laboratory (US)
- Sponsoring Organization:
- USDOE Office of Science (US)
- DOE Contract Number:
- AC03-76SF00515
- OSTI ID:
- 831560
- Report Number(s):
- SLAC-REPRINT-2003-195
- Journal Information:
- Journal of Vacuum Science and Technology, Journal Name: Journal of Vacuum Science and Technology Vol. A21
- Country of Publication:
- United States
- Language:
- English
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