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Characterization of CNx-films by X-ray emission measurements

Journal Article · · Thin Solid Films

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
800608
Report Number(s):
LBNL/ALS--43848
Journal Information:
Thin Solid Films, Journal Name: Thin Solid Films Vol. 402; ISSN THSFAP; ISSN 0040-6090
Country of Publication:
United States
Language:
English

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