Characterization of CNx-films by X-ray emission measurements
Journal Article
·
· Thin Solid Films
- LBNL Library
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 800608
- Report Number(s):
- LBNL/ALS--43848
- Journal Information:
- Thin Solid Films, Journal Name: Thin Solid Films Vol. 402; ISSN THSFAP; ISSN 0040-6090
- Country of Publication:
- United States
- Language:
- English
Similar Records
Characterization of CN(sub x) films by X-ray emission measurements.
In-situ and ex-situ characterization of thin films by soft x-ray emission spectroscopy
Spectroscopic study of CNx films grown by magnetron sputter deposition
Journal Article
·
Mon Jul 01 00:00:00 EDT 2002
· Thin Solid Films
·
OSTI ID:15007700
In-situ and ex-situ characterization of thin films by soft x-ray emission spectroscopy
Journal Article
·
Sun Oct 01 00:00:00 EDT 2000
· Journal of Electron Spectroscopy and Related Phenomena
·
OSTI ID:800122
Spectroscopic study of CNx films grown by magnetron sputter deposition
Journal Article
·
Tue Jun 01 00:00:00 EDT 1999
· Journal of Electron Spectroscopy and Related Phenomena
·
OSTI ID:800351