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In-situ and ex-situ characterization of thin films by soft x-ray emission spectroscopy

Journal Article · · Journal of Electron Spectroscopy and Related Phenomena

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
800122
Report Number(s):
LBNL/ALS--13028
Journal Information:
Journal of Electron Spectroscopy and Related Phenomena, Journal Name: Journal of Electron Spectroscopy and Related Phenomena Journal Issue: 1-3 Vol. 110-111; ISSN JESRAW; ISSN 0368-2048
Country of Publication:
United States
Language:
English

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