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Title: In-situ and ex-situ characterization of thin films by soft x-ray emission spectroscopy

Journal Article · · Journal of Electron Spectroscopy and Related Phenomena

No abstract prepared.

Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
800122
Report Number(s):
LBNL/ALS-13028; JESRAW; TRN: US0202367
Journal Information:
Journal of Electron Spectroscopy and Related Phenomena, Vol. 110-111, Issue 1-3; Other Information: Journal Publication Date: October 2000; PBD: 1 Oct 2000; ISSN 0368-2048
Country of Publication:
United States
Language:
English