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Spectroscopic study of CNx films grown by magnetron sputter deposition

Journal Article · Tue Jun 01 00:00:00 EDT 1999 · Journal of Electron Spectroscopy and Related Phenomena

DOI:https://doi.org/10.1016/S0368-2048(98)00350-8· OSTI ID:800351

Guo, J H ^[1]; Zheng, W T; Sathe, C; Hellgren, N; Nordgren, J

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Research Organization:: Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)

Sponsoring Organization:: US Department of Energy (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 800351

Report Number(s):: LBNL/ALS--29611

Journal Information:: Journal of Electron Spectroscopy and Related Phenomena, Journal Name: Journal of Electron Spectroscopy and Related Phenomena Journal Issue: SI Vol. 103; ISSN JESRAW; ISSN 0368-2048

Country of Publication:: United States

Language:: English

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Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
DEPOSITION
MAGNETRONS
SPECTROSCOPY