Characterization of CN(sub x) films by X-ray emission measurements.
Journal Article
·
· Thin Solid Films
No abstract prepared.
- Research Organization:
- Advanced Photon Source, Argonne National Lab., IL (US); Russian Academy of Sciences (RU); Univ. of Saskatchewan (CA); Tulane Univ. (US); Tsinghua Univ. (ZZ); The Royal Inst. of Great Britain (GB)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 15007700
- Journal Information:
- Thin Solid Films, Journal Name: Thin Solid Films Vol. 402; ISSN THSFAP; ISSN 0040-6090
- Country of Publication:
- United States
- Language:
- English
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